Regular paper

[OPTICAL REVIEW Vol. 5, No. 2 (1998) 83-88]

Application of a Phase-grating Beamsplitter in Laser-Processing Indium-Tin-Oxide Films for Liquid Crystal Panels

Jun AMAKO,* Masami MURAI and Tomio SONEHARA

Corporate R & D, Seiko Epson Corporation, 3-3-5, Owa, Suwa, Nagano, 392-8502 Japan

(Received September 17, 1997; Accepted December 22, 1997)

Array illumination built on a binary phase grating with a green, Q-switched, pulse Nd:YAG laser is used for patterning indium-tin-oxide films into electrodes of liquid crystal display panels. To this end, even-fanout gratings are recursively designed by simulated-annealing algorithm and are realized in quartz glasses by dry- etching. While an array of identically intense beam spots strikes the film, a table supporting the film moves in a direction orthogonal to said spots array at a constant speed, forming a large group of equi-spaced grooves in the film. A machining yield of 1600 mm/s has been attained using a 32×1 grating.

Key words: laser-processing, liquid crystal panel, phase grating, array illumination

*To whom correspondence should be addressed.

 

OPTICAL REVIEW HomePage

© 1994-2011 The Optical Society of Japan (An Affiliate of the Japan Society of Applied Physics)
Produced, Developed, and Maintained by The Optical Society of Japan (An Affiliate of the Japan Society of Applied Physics)
Printed in Japan by Daishowa Printing Co., Ltd.

mail to Editorial Office, OPTICAL REVIEW