Regular Paper

[OPTICAL REVIEW Vol. 21, No. 2 (2014) 179-183]
© 2014 The Japan Society of Applied Physics

Silicon V-Shaped Groove Measurement by Spectral Domain Optical Coherence Tomography

Yuping CHEN1* and Yuwei QIN2

1Department of Aviation Manufacturing Engineering, Xi'an Aernonautical Polytechnic Institute, Xi'an 710089, China
2School of Physics and Electrical Engineering, Weinan Normal University, Weinan, Shaanxi 714000, China

(Received March 31, 2013; Accepted November 16, 2013)

In this research, we focuses on a new detection method for testing a micro electro mechanical systems V-shaped groove in silicon using spectral domain optical coherence tomography with a thermal light source. By this method, the V-shaped groove depth, width and bottom width were measured. The technique, because of its noncontact operation and high acquisition rate, is suitable for on-line precision measurement of V-shaped grooves in silicon.

Key words: microstructure fabrication, optical coherence tomography, spectral interferometric, thermal light source, micro electro mechanical systems

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