Regular Paper

[OPTICAL REVIEW Vol. 21, No. 5 (2014) 651-654]
© 2014 The Japan Society of Applied Physics

Incident-Angle-Dependent Reflectance in Distributed Bragg Reflectors Fabricated from ZnO/MgO Multilayer Films

Ying-Shin HUANG1, Sheng-Yao HU2, Chia-Chih HUANG3, Yueh-Chien LEE3*, Jyh-Wei LEE4, Chung-Cheng CHANG1, Zin-Kuan WUN1, and Kwong-Kau TIONG1

1Department of Electrical Engineering, National Taiwan Ocean University, Keelung 20224, Taiwan
2Department of Digital Technology Design, Tungfang Design University, Hunei, Kaohsiung 82941, Taiwan
3Department of Electronic Engineering, Tungnan University, Shenkeng, New Taipei City 22202, Taiwan
4Department of Materials Engineering, Ming Chi University of Technology, Taishan, New Taipei City 24301, Taiwan

(Received March 30, 2014; Accepted June 27, 2014)

We present the incident-angle-dependent reflectance spectra of the 10-period ZnO/MgO multilayer films deposited on Si by sputtering technique. As increasing the incident angle, the resonant wavelength and bandwidth of the measured reflectance spectra exhibit redshift and narrower, respectively. The theoretical curves using transfer matrix method taken account of transverse electric (TE) and transverse magnetic (TM) polarizations are calculated to well describe the variations in the behavior of the experimental spectra. The simulated TE- and TM-reflection band at different angles can evaluate the bandwidth of the resonance band and provide valuable parameters to design an omnidirectional-reflection band in selected multilayer structure.

Key words: zinc oxide, distributed Bragg reflectors, reflectance, sputtering

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