Regular Paper

[OPTICAL REVIEW Vol. 21, No. 5 (2014) 715-718]
© 2014 The Japan Society of Applied Physics

One-Dimensional Reflective Diffuser for Line Beam Shaper with Microlens Array Homogenizer

Yung-Neng HSIAO1, Hau-Ping WU1, Cheng-Huan CHEN2*, Yu-Chung LIN3, Min-Kai LEE3, and Sung-Ho LIU3

1Department of Power Mechanical Engineering, National Tsing Hua University, Hsinchu, Taiwan 30013, R.O.C.
2Department of Photonics, National Chiao Tung University, Hsinchu, Taiwan 30010, R.O.C.
3Laser Application Technology Center, ITRI South, Industrial Technology Research Institute, Tainan, Taiwan 73445, R.O.C.

(Received March 31, 2014; Revised July 11, 2014; Accepted July 14, 2014)

A laser beam shaping architecture based on a microlens array homogenizer has been exploited, in which the interference effect due to the coherency of the laser source deteriorates the uniformity. Moving diffusers have been considered as an effective way of averaging out the interference pattern. Because the uniformity is required in the line direction only, a one-dimensional reflective-type diffuser with a well-controlled diffusion angle has been proposed and prototyped. The diffuser is attached onto a rotating cylinder for movement in operation. The experiment demonstrates the effectiveness of the scheme, and a line beam with a uniformity of up to 92% has been achieved.

Key words: laser beam shaping, one-dimensional reflective diffuser

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