‘‘ζ66‰ρŒ€‹†‰ο(1975.7)‘
CVD ‚ΖLPE‹Zp‚Μ”δŠr
—case study—
Ί˜a50”N7ŒŽ10“ϊ
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ƒGƒsƒ^ƒLƒVƒƒƒ‹¬’·‚Ι”Ί‚€ŠiŽqŒ‡ŠΧ Šέ–μ ³„ (“ϊ—§’†Œ€”ͺ•”)
GaP LED‚Ι‚¨‚―‚ι‰t‘Š¬’·‚Ζ‹C‘Š¬’· “ΰ“‘ ½ (“ŒŽΕ‘Œ€“d•”Œ€)
GaAs‚ΜƒGƒsƒ^ƒLƒVƒAƒ‹¬’·(LPE‚ΖVPE) Œ΄ “O (Ό‰Ί‹ZŒ€)
Ž₯‹Cƒoƒuƒ‹—pƒK[ƒlƒbƒg‚ΜƒGƒsƒ^ƒLƒVƒƒƒ‹¬’· Ξ“c •Ά•F (“ϊ—§’†Œ€“ρ•”)


–ί‚ι