[OPTICAL REVIEW Vol. 6, No. 4 (1999) 288-292]

Modulation Transfer Function of Blazed Diffractive Optics Produced by Diamond Turning

Yasuhisa TAMAGAWA* and Yoshiki ICHIOKA

Department of Material and Life Science, Graduate School of Engineering, Osaka University, 2-1, Yamadaoka, Suita, Osaka, 565-0871 Japan

(Recieved November 10, 1998; Accepted April 23, 1999)

In blazed diffractive optics produced by the diamond turning process, the finite size of the tool determines the decrease in diffraction efficiency of the desired order. Diffracted light of other orders degrades the image quality. To analyze the influence of the tool, we evaluate diffraction efficiency and phase of periodic gratings based on the electromagnetic theory and calculate modulation transfer function using a linear system approach.

Key words : diffractive optical elements, diamond turning, modulation transfer function, diffraction efficiency