Yasuhiko AOKI, Yuji SHIMADA and Kenichi IGA

Precision and Intelligence Laboratory, Tokyo Institute of Technology, 4259, Nagatsuta, Midori-ku, Yokohama, 226-8503 Japan

(Received April 15, 2000; Accepted September 12, 2000)

We evaluated the collimated beam quality of a planar microlens (PML) for parallel optical interconnect systems. It has been confirmed that the divergence beam from a single mode fiber was collimated by single PML and propagated with good beam quality by about 10 mm, which is the nominal length of microoptics components considered. The divergence beam from a vertical cavity surface emitting laser was collimated using stacked PML and the collimated beam width of 100 μm was obtained. The collimated beam profile was good enough for low loss beam interconnect in a micro-optical bench scheme.

Key words : planar microlens, stacked planar optical circuit, optical interconnect

yaoki@pi.titech.ac.jp