[OPTICAL REVIEW Vol. 8, No. 2 (2001) 85-89]

Surface Shape Measurement by Phase-Shifting Digital Holography

Ichirou YAMAGUCHI, Jun-ichi KATO and Sohgo OHTA

Optical Engineering Laboratory, RIKEN (The Institute of Physical and Chemical Research), 2-1, Hirosawa, Wako, Saitama 351-0198 Japan

(Received February 13, 2001; Accepted February 20, 2001)

Surface contouring by phase-shifting digital holography is proposed that provides surface height from a change of reconstructed phase due to tilting of the object illumination. After phase-unwrapping it directly delivers surface shape. Its sensitivity depends on the tilting angle as well as on the initial incident angle. Although the sensitivity is the same as in the conventional fringe projection, a simpler setup is used without imaging lens and measurement depth is increased due to numerical focusing. We also performed noise suppression by employing nonlinear image-data compression technique that considers amplitude values and attained standard height deviation less than 30 μm from a flat surface.

Key words : interferometry, surface contouring, holography, image processing, speckle