[OPTICAL REVIEW Vol. 8, No. 2 (2001) 148-151]

Determination of Tiny Scatterer's Shape by Light Scattering Tomography

Kazufumi SAKAI1 and Tomoya OGAWA2

1Kumamoto Prefectural College of Technology, 4455-1, Haramizu, Kikuyou-cho, Kikuchi-gun, Kumamoto, 869-1102 Japan, 2Department of Physics, Gakushuin University, 1-5-1, Mejiro, Toshima-ku, Tokyo, 171-8588 Japan

(Received October 26, 2000; Accepted February 19, 2001)

We have developed a new method of recognizing the shape of tiny light scatterers by matrix calculation (conjugate gradient method) using the wave field on the objective lens. We describe simulation results for scatterers of about 100 nm and show that they accurately produce the scatterer shape.

Key words : light scattering tomography, shape of scatterer, Si, matrix calculation