[OPTICAL REVIEW Vol. 8, No. 3 (2001) 179-183]
High Precision Testing Method for Fabry-Perot Etalon
Shin-ichi ITOH1, Yoshiki YAMAZAKI1, Kentaro KATOH1 and Jun CHEN1,2,*
1Faculty of Engineering, Tokyo Institute of Polytechnics, 1583, Iiyama, Atsugi, Kanagawa, 243-0297 Japan, 2CREST, Japan Science and Technology Corporation of Japan, 4-1-8, Honmachi, Kawaguchi, Saitama, 332-0012 Japan
(Received February 19, 2001; Accepted April 19, 2001)
We present a new method for precise measurement of parallelism and relative flatness of a Fabry-Perot etalon. This method is based on the analysis of multiple-beam transmission interference fringe pattern. Two-dimensional defect information is obtained by using small apertures placed over the entire area of the etalon. Experimental results for precise testing of an etalon with repeatability better than λ/2300 to 3σ are presented.
Key words : Fabry-Perot etalon, multiple beam interference, precise measurement, flatness, parallelism