[OPTICAL REVIEW Vol. 8, No. 5 (2001) 323-325]
Thermo-Optic Switch using Fluorinated Silicon Oxide and Organic Spin-on-Glass Films
Hiroyasu KONDO1,3, Kazuaki INOHARA1, Yuki TANIGUCHI2, Junko NAKAHATA2, Tetsuya HOMMA2,3,* and Hideo TAKAHASHI2
1Postgraduate Course of Electrical Engineering, 2Department of Electronic Engineering, Faculty of Engineering, 3Center for Informative and Environmental Materials, Research Organization for Advanced Engineering, Shibaura Institute of Technology, 3-9-14, Shibaura, Minato-ku, Tokyo, 108-8548 Japan
(Received May 7, 2001; Accepted May 28, 2001)
A thermo-optic switch in a thin-film optical waveguide was investigated. Fluorinated silicon oxide (SiOF) and organic spin-on-glass (SOG) films were used as core-layer and clad-layer, respectively, in the waveguide structure. The SiOF films were formed at 23°C by a liquid-phase deposition (LPD) technique using a supersaturated hydrofluosilicic acid (H2SiF6) aqueous solution. Thermal coefficients of the refractive indices for LPD-SiOF and organic SOG films formed on silicon (Si) substrates were −4.0 ×10−6/ °C, −60 × 10−6/ °C at the wavelength of 632.8 nm, respectively. A high extinction ratio of 15 dB was obtained for this switch at the applied voltage of 12.8 V.
Key words : thin-film optical waveguide, optical switch, thermo-optic effect, fluorinated silicon oxide, spin-on-glass