[OPTICAL REVIEW Vol. 10, No. 1 (2002) 58-62]
© 2003 The Optical Society of Japan

Polarization Performance of a New Spectrometer Based on a Multilayer-Coated Laminar Grating in the 150-190-eV Region

Sadayuki ISHIKAWA*, Shigeru ICHIKURA, Takashi IMAZONO, Shigeki OTANI1, Tamio OGUCHI2 and Mihiro YANAGIHARA

Institute of Multidisciplinary Research for Advanced Materials, Tohoku University, 2-1-1 Katahira, Aoba-ku, Sendai 980-8577, Japan

1National Institute for Materials Science, 1-1 Namiki, Tsukuba, Ibaraki 305-0044, Japan

2Department of Quantum Matter, ADSM, Hiroshima University, 1-3-1 Kagamiyama, Higashi-hiroshima, Hiroshima 739-8530, Japan

(Received October 9, 2002; Revised October 9, 2002; Accepted November 5, 2002)

We constructed a polarization spectrometer based on a laminar grating applied with a Mo/B4C multilayer coating. The multilayer-coated grating had been previously evaluated to have high polarizance at around 6.7 nm (184 eV) due to the Brewster reflection. In this study the polarization spectrometer was found to be usable in a range from 150 to 190 eV. Using it, σ and π emission spectra in the B 1s emission from a CrB2 single crystal were separately recorded for the first time in the soft x-ray region. The spectral feature of the emission was reasonably well reproduced by the band calculation.

Key words: multilayer grating, soft x-ray spectrometer, polarization, CrB2, B 1s emission, σ emission, π emission