[OPTICAL REVIEW Vol. 10, No. 4 (2003) 301-302]
© 2003 The Optical Society of Japan
Characterization of Microoptic Arrays by Evaluation of the Axial Confocal Response
Tobias WIESENDANGER, Yoshiaki YASUNO1, Aiko RUPRECHT, Toyohiko YATAGAI1 and Hans TIZIANI
Institut fur Technische Optik, University of Stuttgart, Pfaffenwaldring 9, 70569 Stuttgart, Germany
1Institute for Applied Physics, University of Tsukuba, Tennodai 1-1-1, Tsukuba, Ibaraki, 305-8573, Japan
(Received January 27, 2003; Accepted May 13, 2003)
Fast characterisation and defect recognition of microlens arrays is a problem unsolved. Results of measurements using a system based on the confocal principle working in parallel to determine spherical aberrations, focal lengths and void elements of microoptic arrays are presented.
Key words: microoptics, microlens-arrays, microlens-testing, aberrations, confocal axial response