[OPTICAL REVIEW Vol. 10, No. 4 (2003) 318-320]
© 2003 The Optical Society of Japan

Determination of Aberration Coefficient of Microoptic Arrays from Axial Confocal Response by Neural Method

Yoshiaki YASUNO, Tobias WIESENDANGER1, Aiko RUPRECHT1, Toyohiko YATAGAI and Hans J. TIZIANI1

Institute of Applied Physics, University of Tsukuba, 1-1-1 Tennodai, Tsukuba, Ibaraki 305-8573, Japan
1Institut fur Technische Optik, University of Stuttgart, Pfaffenwaldring 9, 70569 Stuttgart, Germany

(Received January 31, 2003; Accepted May 9, 2003)

We propose a high-speed and parallel method to determine lens aberrations from its confocal axial response. This method analyzes the intensity confocal response including the aberration information of the objective lens by means of neural network algorithm. This method is designed to work parallely for many microlenses, and simultaneously determines aberrations of each element of a microlens array. A prototype system can determine spherical aberration coefficients of a microlens in the range from -0.7λ to 0.3λ with less than 1% RMS error.

Key words: neural network, confocal, micro optics, aberration