Min-Sik JO

Technology Research Center, Agency for Defense Development, Yusong P.O. Box 35-5, Taejon 305-600, Korea

(Received July 30, 2003; Accepted November 10, 2003)

Performance optimization of phase-shifting interferometry was investigated using data average on wide range roughness measurement. The interferometry performance was strongly affected by data average and an optimal data averaging condition of minimal measurement error was found. The high limit roughness level which makes the data average available for the interferometry performance optimization providing a reproducible and smallest roughness was determined to be about 5 A rms roughness. Therefore, the optimal interferometry performance absolutely required data average for finer surfaces than about 5 A rms roughness. On the other hand, the optimal interferometry performance for surfaces rougher than about 10 A rms required little data average. The reliability of the optimal performance of phase-shifting interferometry was checked.

Key words: phase-shifting interferometry, performance optimization, surface roughness, data average availability