[OPTICAL REVIEW Vol. 13, No. 1 (2006) 24-28]
© 2006 The Optical Society of Japan

Fabrication of Small Fluorescence Scale Patterns by Electron Beam Drawing Using Polymer Film Containing Fluorescence Dye

Tatsuhiko SUGIYAMA, Satoshi YONEYAMA, Haruyuki AWANO and Makoto MINAKATA

Research Institute of Electronics, Shizuoka University, 3-5-1 Johoku, Hamamatsu, Shizuoka 432-8011, Japan

(Received October 24, 2005; Accepted November 29, 2005)

We report the fabrication of a resolution–evaluation chart and a scale for a fluorescence microscope. Small fluorescence patterns were fabricated by irradiating an electron beam (EB) in a thin film prepared by dispersing fluorescence dye (rhodamine 590) in poly(methyl methacrylate) (PMMA) and by development to remove EB-irradiated parts. As a result, the fluorescence emission pattern of nanometer order (a line width of 110 nm and a line interval of 370 nm) with sufficient fluorescence intensity was obtained, and a 1 μm bright fluorescence scale for the laser scanning fluorescence microscope was fabricated. These fluorescence patterns are handled easily and are effective for measurement using a fluorescence microscope.

Key words: fluorescence scale, fluorescence microscope, resolution evaluation, high-resolution microscope