Saburo NONOGAKI

(Received May 2, 2005; Accepted October 24, 2005)

Intensity distribution of transverse electric (TE) wave diffracted by a perfectly black half plane or an infinite slit opened in a perfectly black plane is calculated precisely. In the case of diffraction by a half plane, the intensity distribution has a parabolic undulation pattern, while in diffraction by an infinite slit, the calculation enables estimation of the line resolution capability of contact or proximity printing in photolithography.

Key words: diffraction, photolithography, resolution, contact printing