[OPTICAL REVIEW Vol. 13, No. 4 (2006) 195-200]
© 2006 The Optical Society of Japan

Two-Dimensionally Self-Holding Deflection Mirror Using Surface Acoustic Wave Motor

Takayuki ISEKI*, Takashi SHIGEMATSU1, Mikio OKUMURA, Takashi SUGAWARA and Minoru K. KUROSAWA1

Technology Development Division, Victor Company of Japan, Ltd. (JVC), 58-7 Shinmei-cho, Yokosuka, Kanagawa 239-8550, Japan
1Department of Advanced Applied Electronics, Tokyo Institute of Technology, 4259 Nagatsuta, Midori-ku, Yokohama 226-8502, Japan

(Received October 12, 2004; Accepted April 24, 2006)

We have developed a two-dimensionally deflecting mirror actuating system with a deflection angle of 20°, which takes full advantage of the characteristics of a two-dimensional surface acoustic wave (SAW) motor. A magnetic slider moves with frictional drive by the Rayleigh mode of the SAW and deflects the mirror by the force of magnetic attraction. For the actuation of a 20° deflection angle, only a 10 ms duration of driving voltage is required owing to the high-speed characteristic of the motor, followed by an additional 10 ms for damping of the mirror structure produced in order to complete holding of the angle. No power supply is necessary to hold the angle. Furthermore, the resolution of the angle is 0.0015° because of the high-resolution capability of the motor. The mirror deflection system showed a 104 dynamic range of angle positioning ability.

Key words: self-holding, mirror, two-dimensional, magnetic attraction force, surface acoustic wave, MEMS

*E-mail address: iseki-takayuki@jvc-victor.jp