Ikuo ARATA^*, Yoshio ISOBE, and Toshimichi ISHIZUKA

Systems Division, Hamamatsu Photonics K.K., 812 Joko-cho, Higashi-ku, Hamamatsu 431-3196, Japan

(Received July 14, 2008; Accepted December 1, 2008)

We have developed a thermal microscope which has an InSb detector and optics optimized for the camera. Using this system, we evaluated maximum resolution of a 30×/numerical aperture 0.71 lens made of silicon and germanium, and achieved the cutoff frequency of around 300 line pairs/mm, which is almost a diffraction-limited performance. The thermal microscope is installed on the THEMOS-1000, a product of Hamamatsu Photonics, for thermal emission analysis.

Key words: thermal imaging, thermal microscopy, thermal emission analysis, InSb, failure analysis, semiconductor

^*E-mail address: arata@sys.hpk.co.jp