Chih-Kung LEE^1,2,3, Tsung-Dar CHENG¹, Shu-Sheng LEE⁴, and Chin-Kai CHANG¹

¹Institute of Applied Mechanics, National Taiwan University, Taipei 10617, Taiwan
²Engineering Science and Ocean Engineering, National Taiwan University, Taipei 10617, Taiwan
³Industrial Technology Research Institute (ITRI), Hsinchu 31040, Taiwan
⁴Systems Engineering and Naval Architecture, National Taiwan Ocean University, Keelung 20224, Taiwan

(Received July 15, 2008; Accepted February 2, 2009; Revised January 10, 2009)

We developed a new mechanical configuration which combines various optical techniques to maximize dynamic range and to optimize resolution in optical instruments. We assessed various optical configurations by looking at such variables as electronic signal processing and mechanical construction. Previous configurations developed over the last 10 years are discussed. In our new configuration, we adopted and integrated devices such as a microscopic, an interferometer, an electronic speckle pattern interferometer, and a photon tunneling microscope. We examined the impact of our new configuration on future opto-mechatronic systems design. Our new configuration can be an effective and versatile optical metrology tool for enhancing the performance of MEMS and NEMS devices.

Key words: interferometry, metrology, optical systems, ESPI, Doppler interferometer, AVID