Cheng-Chung JAING^*, Yi-Lin SHIE, Chien-Jen TANG¹, Yeuh-Yeong LIOU², Chun-Ming CHANG³, and Chii-Rong YANG⁴

Department of Optoelectronic System Engineering/Department of Electronic Engineering, Minghsin University of Science and Technology, Hsinchu 304, Taiwan
¹Department of Optics and Photonics/Thin Film Technology Center, National Central University, Chungli 320, Taiwan
²Department of Electronic Engineering, Chienkuo Technology of University, Changhua 500, Taiwan
³Instrument Technology Research Center, Hsinchu 300, Taiwan
⁴Department of Mechatronic Technology, National Taiwan Normal University, Taipei 106, Taiwan

(Received July 12, 2008; Accepted January 15, 2009)

This investigation accurately measures the relationship between applied voltage and the displacement of a piezoelectric transducer device both by analyzing phase shifting interferometry algorithms and using a Twyman–Green interferometer. Simulations are performed to calculate unknown phase shifts, especially around π/2 and 3π/2. It is indicated that the Hariharan algorithm is indeed an effective phase shifting interferometry algorithm.

Key words: displacement, phase shifting interferometry, algorithm, Twyman–Green interferometer, Hariharan algorithm, piezoelectric transducer

^*E-mail address: ccjaing@must.edu.tw