[OPTICAL REVIEW Vol. 16, No. 4 (2009) 413-415]
© 2009 The Optical Society of Japan
Optical Design of Bent Rib Waveguide with MOS Cross-Section
Chih T'sung SHIH1,2, Zhi Wei ZENG2, Yin Cheng CHANG2, Yao-Jen LEE3, and Shiuh CHAO2*
1Industrial Technology Research Institute, Chutung, Hsinchu, Taiwan 31040, R.O.C.
2Institute of Photonics Technologies, National Tsing Hua University, Hsinchu, Taiwan 30013, R.O.C.
3National Nano Device Laboratories, Hsinchu, Taiwan 30013, R.O.C.
(Received October 20, 2008; Accepted March 2, 2009)
We provided a single-mode bent MOS-cross-section rib waveguide design with 0.9 dB/cm bending loss at 25 μm bending radius. The peak position for the TE-like mode was tuned to the gate oxide around which the maximum amount of free carriers are accumulated to optimize the free carrier dispersion effect.
Key words: integrated optics, modulator, optical waveguides, rib waveguide, waveguide bends, and waveguide
*E-mail address: schao@ee.nthu.edu.tw