Daisuke SAKAI¹, Daichi MIHO², Kenji HARADA², Daisuke BARADA^1,3,4, and Takashi FUKUDA¹

¹Photonics Research Institute, National Institute of Advanced Industrial Science and Technology, AIST Tsukuba Central 5, 1-1-1 Higashi, Tsukuba, Ibaraki 305-8565, Japan
²Department of Computer Science, Kitami Institute of Technology, 165 Koen-cho, Kitami, Hokkaido 090-8507, Japan
³Graduate School of Engineering, Utsunomiya University, 7-1-2 Yoto, Utsunomiya 321-8585, Japan
⁴Center for Optical Research and Education, Utsunomiya University, 7-1-2 Yoto, Utsunomiya 321-8585, Japan

(Received September 16, 2009; Accepted December 12, 2009)

We have succeeded in the first fabrication of a diffractive structure replicated onto a glass substrate using a template of self-assembled polystyrene particles via corona-charging treatment. A hexagonal close-packed structure of self-assembled particles was used as the template in the structural replication. As a result, a sixfold symmetric diffraction pattern was generated from the glass substrate, on/in which the diffractive structure was replicatively fabricated. The dependence of the diffraction efficiency on processing time of corona-charging treatment was examined. It was found that the diffraction efficiency increased with treatment time up to 2 h. The observed first-order diffraction efficiency was 2.4 × 10^-3%. In contrast, the diffraction efficiency decreased after 2 h treatment under our current experimental conditions. This trend of diffraction efficiency was discussed on the basis of structural changes of the polystyrene template.

Key words: replicative fabrication, structural template, diffractive structure, self-assembled polystyrene particles, glass substrate, corona-charging treatment