[OPTICAL REVIEW Vol. 18, No. 1 (2011) 96-98]
© 2011 The Japan Society of Applied Physics
The Glass-Molding Process for Planar-Integrated Micro-Optical Component
Chien-Yao HUANG1,2*, Jyh-Rou SZE1, Kuo-Cheng HUANG1, Chao-Hui KUO1, Shih-Feng TSENG1,2, and Chang-Pin CHOU2
1Instrument Technology Research Center, National Applied Research Laboratories, 20, R&D Rd. VI, Hsinchu Science Park, Hsinchu 300, Taiwan
2Department of Mechanical Engineering, National Chiao Tung University, 1001 University Road, Hsinchu 300, Taiwan
(Received May 28, 2010; Accepted November 1, 2010)
This paper presents a precision glass-molding process to fabricate planar-integrated micro-optical components (PIMOC) applied to a micro projection display system, optical interconnection system and optical storage system. The PIMOC was designed based on wave propagation theory, and fabricated using a glass molding process. Experimental results are discussed in this article. The experiment showed that the PIMOC fabricated in a vacuum environment meets the design value with precision glass-molding technology (PGMT) at a molding force of 2.75 kN, a molding temperature of 750 °C and a cooling rate of 49 °C/min.
Key words: precision glass-molding technology (PGMT), planar-integrated micro-optical component (PIMOC)
*E-mail address: msyz@itrc.narl.org.tw