Katsumi YAMADA, Akemi KYOYA, Junji SONE¹, and Jun CHEN²

Department of Nanochemistry, Tokyo Polytechnic University, 1583 Iiyama, Atsugi, Kanagawa 243-0297, Japan
¹Department of Applied Computer Science, Tokyo Polytechnic University, 1583 Iiyama, Atsugi, Kanagawa 243-0297, Japan
²Department of Media and Image Technology, Tokyo Polytechnic University, 1583 Iiyama, Atsugi, Kanagawa 243-0297, Japan

(Received May 30, 2010; Revised August 8, 2010; Accepted September 10, 2010)

Conductive polymer three-dimensional microstructures were photofabricated utilizing the two-photon absorption of a sensitizer dye. The resulting three-dimensional structures were excised from the transparent polymer sheet using a micro-manipulator. The processing precisions for the vertical direction of the conductive polymer three-dimensional microstructure obtained in the transparent polymer sheet were evaluated in the present study. As a result, for the configurations of the obtained polypyrrole line deposition, the line height/line width ratios were around 5:1; this ratio is higher than that of other UV resin works (h:w = 2.4-3:1) and the cross section distortion is not negligible for maintaining the higher reproducibility of the photofabrication.

Key words: photofabrication, conductive polymers, multi-photon absorption, femtosecond laser