Shih-Feng TSENG^1*, Wen-Tse HSIAO¹, Han-Chao CHANG¹, and Ming-Fei CHEN²

¹Instrument Technology Research Center, National Applied Research Laboratories, Hsinchu 30076, Taiwan
²Department of Mechatronics Engineering, National Changhua University of Education, Changhua 50007, Taiwan

(Received August 13, 2012; Revised December 25, 2012; Accepted December 25, 2012)

This study proposes a beam shaper for converting a circle beam profile generated with a Gaussian intensity distribution by an 808 nm diode laser into a line beam profile for silicon surface treatment applications. To produce a hand-held and low-cost device with a large spot-size laser, this study uses a portable optical system consisting of a diode laser source, a collimator, a cylindrical lens, and a plano-convex lens to generate an approximately 40 × 3.5 mm² line beam profile at a working distance of 200 mm. The silicon surface treated by the line-shaped laser beam has significantly reduced reflectance spectra. The proposed system is also suitable for the surface cleaning of materials.

Key words: diode laser, line beam profile, portable optical system, surface cleaning, surface treatment

^*E-mail address: tsengsf@itrc.narl.org.tw