Feng ZHU, Yan-Hao YU, Ru-Long JIN, Ai-Wu LI^*, Yong-Sen YU, and Han YANG^†

State Key Laboratory on Integrated Optoelectronics, College of Electronic Science and Engineering, Jilin University, Changchun 130012, China

(Received September 4, 2012; Revised April 17, 2013; Accepted May 30, 2013)

Zinc oxide films prepared by magnetron sputtering are introduced to the electro-optical detection to improve the voltage sensitivity. With the help of large piezoelectric effect, ZnO films make up for the deficiency of the low electro-optical coefficient. In this paper, we illustrated the mechanism of piezo-induced enhancements, and measured the electric signals on the line of coplanar waveguides. This method breaks through the limit of material species for optoelectronically responsive sensing, and shows promising applications in optical detection.

Key words: electro-optical detection, electro-optic effect, the inverse piezoelectric effect, ZnO films, electric-field sensor

^*E-mail address: liaiwu2008@yahoo.com.cn
^†E-mail address: hanyang@jlu.edu.cn