[OPTICAL REVIEW Vol. 20, No. 5 (2013) 374-377]
© 2013 The Japan Society of Applied Physics

Absolute Measurement of Flats with the Method of Shift-Rotation

Weihong SONG1,2*, Fan WU1, Xi HOU1, Wenchuan ZHAO1, and Yongjian WAN1

1Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu 610209, China
2University of Chinese Academy of Sciences, Beijing 100039, China

(Received June 4, 2013; Accepted July 8, 2013)

We present an absolute measurement of flats in a Fizeau interferometer with the method of shift-rotation, which only requires rotational measurements and shift measurement with a translation. Experiments have been carried out to verify the validity of the absolute testing method, and the results show that the reference surface deviation measured with the shift-rotation method agrees well with that of another calibration result with traditional three-flat absolute procedure; the root-mean-square (RMS) of the residual figure between them is ∼0.4 nm.

Key words: absolute measurement, shift-rotation, interferometry, surface measurements

*E-mail address: songscu@163.com