Shizhu ZHANG^*†, Wenfei ZHOU², Xiaoling YE, Bo XU, and Zhanguo WANG

Key Laboratory of Semiconductor Materials Science, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China

(Received March 20, 2013; Accepted June 14, 2013)

This paper mainly describes that the effective index perturbation (EIP) technique in combination with two-dimensional (2D)/three-dimensional (3D) PWE methods predicts resonant mode frequencies and mode patterns for the L3 photonic crystal slab cavity, which substantially reduces the computation time and computer memory without losing accuracy. The simulation results show that when the perturbed effective index by matching dielectric band edge is used, the fundamental resonant mode has small calculation frequency error; however, when the effective index obtained by the standard effective index method (EIM) is used, it is appropriate for predicting higher-order resonant modes, and the micro-photoluminescence experiments verify the predictions of the theoretical model. In addition, mode profiles of the L3 cavity with both the displacement of the end-holes and the base cavity structure can also be accurately predicted.

Key words: photonic crystal slab, L3 cavity, effective index, resonant modes

^*E-mail address: shizhuz@semi.ac.cn
^†These authors contributed equally to the work.