Yuping CHEN^1* and Yuwei QIN²

¹Department of Aviation Manufacturing Engineering, Xi'an Aernonautical Polytechnic Institute, Xi'an 710089, China
²School of Physics and Electrical Engineering, Weinan Normal University, Weinan, Shaanxi 714000, China

(Received March 31, 2013; Accepted November 16, 2013)

In this research, we focuses on a new detection method for testing a micro electro mechanical systems V-shaped groove in silicon using spectral domain optical coherence tomography with a thermal light source. By this method, the V-shaped groove depth, width and bottom width were measured. The technique, because of its noncontact operation and high acquisition rate, is suitable for on-line precision measurement of V-shaped grooves in silicon.

Key words: microstructure fabrication, optical coherence tomography, spectral interferometric, thermal light source, micro electro mechanical systems

^*E-mail address: ypc0828@gmail.com