[OPTICAL REVIEW Vol. 21, No. 3 (2014) 280-285]
© 2014 The Japan Society of Applied Physics

A Method to Evaluate Error Correction Ability of Computer Controlled Optical Surfacing Process

Jia WANG1,2*, Bin FAN1, Yongjian WAN1,3, Chunyan SHI1, and Bin ZHUO1

1Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu 610209, China
2University of Chinese Academy of Sciences, Beijing 100039, China
3State Key Laboratory of Optical Technology for Microfabrication, Chengdu 610209, China

(Received November 23, 2013; Accepted February 21, 2014)

Quantitatively investigating error correction ability in frequency domain is important for computer controlled optical surfacing (CCOS) process to correct different spatial frequency errors. Based on the mathematical model coherence between filtering and material removal process of CCOS, a method is proposed to quantitatively evaluate the correction ability of CCOS process. A generalized model named normalized smoothing spectral function (SSF) will be established combine convolution model of CCOS and power spectral density (PSD) function. A set of polishing experiments are performed to calculate SSF curves and validate SSF model. By comparing the results of SSF curve with PSD curve and surface figure, it reveals that SSF curve can quantitatively indicate the correction ability of CCOS process for different spatial frequency errors.

Key words: CCOS process, power spectral density, convolution model, spatial frequency domain

*E-mail address: wangj062778@qq.com