Ying-Shin HUANG¹, Sheng-Yao HU², Chia-Chih HUANG³, Yueh-Chien LEE^3*, Jyh-Wei LEE⁴, Chung-Cheng CHANG¹, Zin-Kuan WUN¹, and Kwong-Kau TIONG¹

¹Department of Electrical Engineering, National Taiwan Ocean University, Keelung 20224, Taiwan
²Department of Digital Technology Design, Tungfang Design University, Hunei, Kaohsiung 82941, Taiwan
³Department of Electronic Engineering, Tungnan University, Shenkeng, New Taipei City 22202, Taiwan
⁴Department of Materials Engineering, Ming Chi University of Technology, Taishan, New Taipei City 24301, Taiwan

(Received March 30, 2014; Accepted June 27, 2014)

We present the incident-angle-dependent reflectance spectra of the 10-period ZnO/MgO multilayer films deposited on Si by sputtering technique. As increasing the incident angle, the resonant wavelength and bandwidth of the measured reflectance spectra exhibit redshift and narrower, respectively. The theoretical curves using transfer matrix method taken account of transverse electric (TE) and transverse magnetic (TM) polarizations are calculated to well describe the variations in the behavior of the experimental spectra. The simulated TE- and TM-reflection band at different angles can evaluate the bandwidth of the resonance band and provide valuable parameters to design an omnidirectional-reflection band in selected multilayer structure.

Key words: zinc oxide, distributed Bragg reflectors, reflectance, sputtering

^*E-mail address: jacklee@mail.tnu.edu.tw