�¡“úŽž�¡
 2017”N 1ŒŽ 30“ú(ŒŽ)�@10:00-16:30

�¡ƒe�[ƒ}�¡
�æ’[CMOSƒfƒoƒCƒX�Eƒvƒ�ƒZƒX‹Z�p

�¡�ê�Š�¡
‹@ŠB�U‹»‰ïŠÙ’n‰º3ŠKŒ¤�C1�†Žº
�§105-0011 “Œ‹ž“s�`‹æŽÅŒö‰€3-5-8
“Œ‹žƒ�ƒgƒ�“ú”ä’J�ü �_’J’¬‰w‰ºŽÔ “k•à8•ª

	http://www.jspmi.or.jp/kaigishitsu/access.html
       
�¡‹¤�Ã�¡
“dŽq�î•ñ’Ê�MŠw‰ïƒVƒŠƒRƒ“�Þ—¿�EƒfƒoƒCƒXŒ¤‹†‰ï�iSDM�j

�¡ŽQ‰Á”ï�¡
•ª‰È‰ï‰ïˆõ 1,000‰~�A‚»‚Ì‘¼�@2,000‰~

�¡ƒvƒ�ƒOƒ‰ƒ€�¡

10:00-10:30
“™“dŽqƒgƒ‰ƒbƒv‹Z�p‚É‚æ‚éƒIƒ““d—¬‘�‘å‚É”º‚¤‘Š•âŒ^ƒgƒ“ƒlƒ‹ƒgƒ‰ƒ“ƒWƒXƒ^‰ñ˜H‚Ì�«”\Œü�ã
�X ‹M—m, �óˆä‰h‘å, •ž•”�~ˆê, •Ÿ“c�_ˆê, ‘å’Ë�T‘¾˜Y, �X“c�s‘¥, ‘å“à�^ˆê, 
�X“c—TŽi, ‰E“c�^Ži, �…—Ñ ˜j, ‘¾“c—T”V, �¼�ì ‹M
ŽY‹Æ‹Z�p‘��‡Œ¤‹†�Š ƒiƒmƒGƒŒƒNƒgƒ�ƒjƒNƒXŒ¤‹†•”–å

10:30-11:00
Ge/III-V‘°”¼“±‘Ì‚ð—p‚¢‚½ƒgƒ“ƒlƒ‹FET‹Z�p
�‚–Ø�Mˆê, ˆÀ ‘åà…, –ìŒû�@—², Œã“¡�‚Š°, �¼ �Nˆê, ‹à è{Ÿª, ’|’†�[ˆê
“Œ‹ž‘åŠw‘åŠw‰@ �HŠwŒnŒ¤‹†‰È “d‹CŒn�HŠw�ê�U�Š

11:00-11:30
Experimental Study on Polarization-Limited Operation Speed of
Negative Capacitance FET with Ferroelectric HfO2
�¬—Ñ�³Ž¡, �ãŽR –], ? ‹žûa, •½–{�r˜Y
“Œ‹ž‘åŠw�¶ŽY‹Z�pŒ¤‹†�Š

11:30-12:00
ƒTƒu10 nm�¢‘㕉�«—e—ÊFinFET‚̃fƒoƒCƒXƒVƒ~ƒ…ƒŒ�[ƒVƒ‡ƒ“
‘¾“c—T”V1, ’r�ã •×1, •ž•”�~ˆê1, •Ÿ“c�_ˆê1, ‰E“c�^Ži1, ’¹ŠC –¾2
1�‘—§Œ¤‹†ŠJ”­–@�l ŽY‹Æ‹Z�p‘��‡Œ¤‹†�Š�C2“Œ‹ž‘åŠw‘åŠw‰@ �HŠwŒ¤‹†‰È


’‹�H�i12:00-13:30�j


13:30-14:00
16/14 nmƒm�[ƒhˆÈ�~‚É‚¨‚¢‚¯‚é�‚‘¬‚©‚Â�‚�M—Š�«‚ð—L‚·‚é�¬�Úƒtƒ‰ƒbƒVƒ…ƒ�ƒ‚ƒŠŒü‚¯
FinFET Split-Gate MONOS
’Óc�¥•¶1, �쓈�Ë”V1, ‰€“cŒ«ˆê˜Y1, ‹g•y“ÖŽi1, ŽOŒ´—³‘P1, –ŠC�rˆê1,
ˆä�ã�^—Y1, ‘º’†�½Žu1, ŠÛŽR—²�O1, ŽR‰º•ü�O1, ŽRŒû‘×’j1, ‹v–{ ‘å2
1ƒ‹ƒlƒTƒX ƒGƒŒƒNƒgƒ�ƒjƒ‹ƒlƒTƒX, 2“ú—§�»�ì�Š

14:00-14:30
“dˆ³ƒgƒ‹ƒNMRAM(VCM)Œü‚¯“Ç‚Ý�o‚µ/�‘‚«�ž‚݉ñ˜H‚Æ‘å—e—ʃLƒƒƒbƒVƒ…ƒ�ƒ‚ƒŠ‚ւ̉ž—p
‰–“c—zˆê1, –ìŒû�hŠó2,’r�ãˆê—²2, ˆÀ•”ŒbŽq2, “¡“c”E2, –ì�è—²�s1, “’�ó�VŽ¡1, 
—é–Ø‹`–Î3
1ŽY‹Æ‹Z�p‘��‡Œ¤‹†�Š ƒXƒsƒ“ƒgƒ�ƒjƒNƒXŒ¤‹†ƒZƒ“ƒ^�[, 2Š”Ž®‰ïŽÐ“ŒŽÅ Œ¤‹†ŠJ”­ƒZƒ“ƒ^�[�C
3‘å�ã‘åŠw‘åŠw‰@ Šî‘b�HŠwŒ¤‹†‰È •¨Ž¿‘n�¬�ê�U

14:30-15:00
’´’á�Á”ïƒGƒlƒ‹ƒM�[‚Æ�‚�W�Ï�«‚𕹂¹Ž�‚“dˆ³�§ŒäƒXƒsƒ“ƒgƒ�ƒjƒNƒXƒ�ƒ‚ƒŠ
—`“c”Ž–¾, ‰º‘º�®Ž¡, ‘å‘ò—Tˆê, ”’’¹‘�Žu, ‰Á“¡˜ÐŽu, ˆäŒû’q–¾, �ãŒû—TŽO,
ƒuƒ„ƒ“ƒ_ƒ‰ƒC, ƒAƒ‹ƒ^ƒ“ƒTƒKƒC,  �Ä“¡�D�º, �ƒˆä�Ž•F, �™ŽR‰p�s, ‹y�ì‘sˆê,
�´�…�^—�Žq,  �Î�ì��Œb, ’r�ãˆê—², �••” “Ä
(Š”)“ŒŽÅ Œ¤‹†ŠJ”­ƒZƒ“ƒ^�[

‹xŒe�i15:00-15:30�j

15:30-16:00
General relationship for cation and anion doping effects on ferroelectric HfO2 formation
L. Xu1, S. Shibayama1, K. Izukashi1, T. Nishimura1, T. Yajima1, S. Migita2, A. Toriumi1
1Department of Materials Engineering, The University of Tokyo
2National Institute of Advanced Industrial Science and Technology

16:00-16:30
‘½—l‰»‚·‚éƒAƒiƒ�ƒO�M�†�ˆ—�‚ÉŒü‚¯‚½�V‹K‹@”\�«Žó“®‘fŽq
�|VO2Šö”­�«ƒXƒCƒbƒ`‚Ì�ì�»‚Ɖž—p�|
–æà•j, �¼‘º’m‹I, ’¹ŠC –¾
“Œ‹ž‘åŠw‘åŠw‰@ �HŠwŒnŒ¤‹†‰È ƒ}ƒeƒŠƒAƒ‹�HŠw�ê�U