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| プログラム |
| |
講演タイトル/発表者 |
| 10:00 〜 10:10 |
"Opening Adress"
Yakichi Higo, P&I Lab. Tokyo Institute of Technology, Japan |
| 10:10 〜 10:50 |
"Investigation of PDMS as MEMS material and microfluidics"
Prof. Dr. Sekwang Park, Electrical Engineering Department, Kyunpook National
University, Koria |
| 10:50 〜 11:30 |
"Towards the Standardization of Mechanical Characterization Techniques
for MEMS"
Joao Gaspar and Oliver Paul, Microsystems Materials Laboratory (MML), Department
of Microsystems Engineering(IMTEK), University of Freiburg, Germany |
| 11:30 〜 12:10 |
"Mechanical Properties in Nanoimprint Lithography Process"
Hak Joo Lee, Korea Institute of Machinery & Materials, Korea |
| 12:10 〜 13:30 |
Lunch |
| 13:30 〜 14:10 |
"Deformation and Fracture Modes of Metallic Multilayered Films"
Guang-Ping Zhang1, Bin Zhang2, Yuan-Ping Li1,
1 Shenyang National Laboratory for Materials Science,
2 Key Laboratory for Anisotropy and Texture of Materials of Ministry of
Education, School of Materials and Metallurgy, Northeastern University,
Shenyang, P. R. China |
| 14:10 〜 14:50 |
"Investigation of Deformation and Fracture at Small Scales"
Oliver Kraft, Reiner Monig, Andreas Sedlmayr, Daniel Gianola, KIT - Karlsruhe
Institute of Technology, Germany |
| 14:50 〜 15:30 |
"Study on Fatigue Damage of Micro/Nano Scale Silicon"
Yoshitada Isono, Intelligent Artifacts & Manufacturing Systems Laboratory,
Department of Mechanical Engineering, Kobe University, Japan |
| 15:30 〜 |
"Closing remark"
Kazuki Takashima, Kumamoto University，Japan |
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